Highly conformal tungsten nitride films for use in microelectronics and semiconductors

Summary

The invention describes a method of producing a uniform, smooth and conformal coating of tungsten nitride, synthesized by atomic layer deposition (ALD). The silver-colored coating (or film) is metallic and a good electrical conductor.

Applications

Suitable applications in microelectronics include barriers to the diffusion of copper and electrodes for thin film capacitors and field-effect transistors (FETs). Similar processes deposit molybdenum nitride, which is suitable for layers alternating with silicon in x-ray mirrors. Other markets addressed include
Atomic Layer Deposition and use in semiconductors.

Additional Information:

Intellectual Property Status: Issued U.S. patent nos.: 7,560,581

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