Vertical support structure to realize photonic structures from bulk substrates
This invention is a major step forward, consisting of a 3D nanofabrication method to fabricate the nanophotonic devices from the bulk crystal. It enables chip-scale nanophotonic devices with properties not available in conventional thin films. This invention holds the promise of being a basic foundational patent for future commercial applications of nanophotonics.
Intellectual Property Status: Patent(s) Pending
Nanophotonics offers great potential for telecommunications and computing. One barrier has been how to implement nanophotonic devices into conventional semiconductors.